HVAC for Semiconductor Facilities: Precision Climate Control for a High-Stakes Industry
In the semiconductor manufacturing world, precision isn’t just a preference—it’s a necessity. These facilities, also known as fabs (fabrication plants) , require ultra-clean, tightly controlled environments to ensure the production of microchips with extreme accuracy and reliability. At the heart of this delicate operation is a highly engineered HVAC system , designed not only to manage temperature and humidity but also to maintain ultra-low particulate levels. Let’s explore the vital role of HVAC in the semiconductor industry, the challenges it faces, and the technologies that make it all possible. Why Semiconductor HVAC is Unique Unlike traditional commercial HVAC systems, HVAC for semiconductor plants must achieve: Cleanroom standards (ISO Class 1–6) Tight temperature control (±0.1–0.5°C) Strict humidity ranges (typically 40–60% RH) High air change rates (up to 600 air changes per hour) Pressure differentials to prevent cross-contamination These req...